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1

High performance diffraction gratings made by e-beam lithography

Zeitner, Uwe D., Oliva, Maria, Fuchs, Frank, Michaelis, Dirk, Benkenstein, Tino, Harzendorf, Torsten, Kley, Ernst-Bernhard

Journal:

Applied Physics A: Materials Science & Processing

Year:

2012

Language:

english

File:

PDF, 1.79 MB

english, 2012

2

Advanced mask aligner lithography: new illumination system

Voelkel, Reinhard, Vogler, Uwe, Bich, Andreas, Pernet, Pascal, Weible, Kenneth J., Hornung, Michael, Zoberbier, Ralph, Cullmann, Elmar, Stuerzebecher, Lorenz, Harzendorf, Torsten

Journal:

Year:

2010

Language:

english

File:

PDF, 2.21 MB

english, 2010

3

SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII - Efficient fabrication of complex nano-optical structures by E-beam lithography based on character projection

von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Zeitner, Uwe D., Harzendorf, Torsten, Fuchs, Frank, Banasch, Michael, Schmidt, Holger, Kley, Ernst-Bernhard

Year:

2014

Language:

english

File:

PDF, 823 KB

english, 2014

4

SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V - Wafer scale fabrication of submicron chessboard gratings using phase masks in proximity lithography

Stuerzebecher, Lorenz, Harzendorf, Torsten, Fuchs, Frank, Zeitner, Uwe D., Schoenfeld, Winston V., Rumpf, Raymond C., von Freymann, Georg

Year:

2012

Language:

english

File:

PDF, 17.59 MB

english, 2012

5

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect

Stuerzebecher, Lorenz, Harzendorf, Torsten, Vogler, Uwe, Zeitner, Uwe D., Voelkel, Reinhard

Journal:

Year:

2010

Language:

english

File:

PDF, 1.49 MB

english, 2010

6

Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach

Michaelis, D., Zeitner, U. D., Tünnermann, A., Oliva, M., Harzendorf, T.

Journal:

Year:

2011

Language:

english

File:

PDF, 1.35 MB

english, 2011

7

Waveguide Grating Radial Polarizer for the Photolithography of Circularly Symmetrical Optical Elements

Jourlin, Yves, Tonchev, Svetlen, Parriaux, Olivier, Sauvage-Vincent, Jean, Harzendorf, Torsten, Zeitner, Uwe

Journal:

IEEE Photonics Journal

Year:

2012

Language:

english

File:

PDF, 1.10 MB

english, 2012

8

Intermittence effect in electron beam writing

L.-Chr. Wittig, M. Cumme, T. Harzendorf, E.-B. Kley

Journal:

Microelectronic Engineering

Year:

2001

Language:

english

File:

PDF, 431 KB

english, 2001

9

Highly efficient three-level blazed grating in the resonance domain

Oliva, Maria, Michaelis, Dirk, Benkenstein, Tino, Dunkel, Jens, Harzendorf, Torsten, Matthes, Andre, Zeitner, Uwe D.

Journal:

Year:

2010

Language:

english

File:

PDF, 371 KB

english, 2010

10

The interaction between pupil function and cardiovascular regulation in patients with acute schizophrenia

Karl-Jürgen Bär, Michael Karl Boettger, Steffen Schulz, Christina Harzendorf, Marcus Willy Agelink, Vikram K. Yeragani, Prtap Chokka, Andreas Voss

Journal:

Clinical Neurophysiology

Year:

2008

Language:

english

File:

PDF, 243 KB

english, 2008

11

Correlations between the autonomic modulation of heart rate, blood pressure and the pupillary light reflex in healthy subjects

Karl-Jürgen Bär, Steffen Schulz, Mandy Koschke, Christina Harzendorf, Sabine Gayde, Wolfgang Berg, Andreas Voss, Vikram K. Yeragani, Michael Karl Boettger

Journal:

Journal of the Neurological Sciences

Year:

2009

Language:

english

File:

PDF, 388 KB

english, 2009

12

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

Savenko, Alexey, Yildiz, Izzet, Petersen, Dirch Hjorth, Bøggild, Peter, Bartenwerfer, Malte, Krohs, Florian, Oliva, Maria, Harzendorf, Torsten

Journal:

Year:

2013

Language:

english

File:

PDF, 913 KB

english, 2013

13

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Micro-Optics 2010 - Smart technology for blazed multilevel gratings in resonance domain

Oliva, M., Benkenstein, T., Dunkel, J., Harzendorf, T., Matthes, A., Michaelis, D., Zeitner, U. D., Thienpont, Hugo, Van Daele, Peter, Mohr, Jürgen, Zappe, Hans

Year:

2010

Language:

english

File:

PDF, 766 KB

english, 2010

14

High-energy, ceramic-disk Yb:LuAG laser amplifier

Siebold, M., Loeser, M., Roeser, F., Seltmann, M., Harzendorf, G., Tsybin, I., Linke, S., Banerjee, S., Mason, P. D., Phillips, P. J., Ertel, K., Collier, J. C., Schramm, U.

Journal:

Year:

2012

Language:

english

File:

PDF, 3.08 MB

english, 2012

15

High-energy diode-pumped D_2O-cooled multislab Yb:YAG and Yb:QX-glass lasers

Siebold, Mathias, Loeser, Markus, Harzendorf, Gunter, Nehring, Harald, Tsybin, Igor, Roeser, Fabian, Albach, Daniel, Schramm, Ulrich

Journal:

Year:

2014

Language:

english

File:

PDF, 602 KB

english, 2014

16

[IEEE 12th European Quantum Electronics Conference CLEO EUROPE/EQEC - Munich, Germany (2011.05.22-2011.05.26)] 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference (CLEO EUROPE/EQEC) - Nano-optical gratings for integrated laser interferometer arrays

Michaelis, D., Oliva, M., Benkenstein, T., Harzendorf, T., Matthes, A., Zeitner, U.

Year:

2011

Language:

english

File:

PDF, 360 KB

english, 2011

17

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Micro-Optics 2014 - Fast character projection electron beam lithography for diffractive optical elements

Thienpont, Hugo, Mohr, Jürgen, Zappe, Hans, Nakajima, Hirochika, Harzendorf, Torsten, Fuchs, Frank, Banasch, Michael, Zeitner, Uwe D.

Year:

2014

Language:

english

File:

PDF, 1.27 MB

english, 2014

18

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Micro-Optics 2010 - Half-tone proximity lithography

Harzendorf, Torsten, Stuerzebecher, Lorenz, Vogler, Uwe, Zeitner, Uwe D., Voelkel, Reinhard, Thienpont, Hugo, Van Daele, Peter, Mohr, Jürgen, Zappe, Hans

Year:

2010

Language:

english

File:

PDF, 1.66 MB

english, 2010

19

SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII - Application of rigorously optimized phase masks for the fabrication of binary and blazed gratings with diffractive proximity lithography

von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Stuerzebecher, Lorenz, Fuchs, Frank, Harzendorf, Torsten, Meyer, Stefan, Zeitner, Uwe D.

Year:

2014

Language:

english

File:

PDF, 412 KB

english, 2014

20

SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V - Sub-micrometer pattern generation by diffractive mask-aligner lithography

Zeitner, Uwe D., Stuerzebecher, Lorenz, Harzendorf, Torsten, Fuchs, Frank, Michaelis, Dirk, Schoenfeld, Winston V., Rumpf, Raymond C., von Freymann, Georg

Year:

2012

Language:

english

File:

PDF, 1.86 MB

english, 2012

21

Pulse compression grating fabrication by diffractive proximity photolithography

Stuerzebecher, Lorenz, Fuchs, Frank, Harzendorf, Torsten, Zeitner, Uwe D.

Journal:

Year:

2014

Language:

english

File:

PDF, 921 KB

english, 2014

22

Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings

Paul, Thomas, Matthes, Andre, Harzendorf, Torsten, Ratzsch, Stephan, Zeitner, Uwe D.

Journal:

Optical Materials Express

Year:

2015

Language:

english

File:

PDF, 2.63 MB

english, 2015

23

Gefahren durch weltumspannende Reisen

Burchard, Gerd, Cramer, Jakob, Harzendorf, Christina, de Waha, Suzanne

Journal:

Notfallmedizin up2date

Year:

2012

Language:

german

File:

PDF, 227 KB

german, 2012

24

Mundgesundheit von Patienten mit frühkindlicher Karies - Eine klinisch-mikrobiologische Studie

Kneist, S., Grimmer, S., Harzendorf, A., Udhardt, A., Senf, K., Borutta, A.

Journal:

ZWR - Das Deutsche Zahnärzteblatt

Year:

2008

Language:

german

File:

PDF, 335 KB

german, 2008

25

[IEEE 2007 Joint 32nd International Conference on Infrared and Millimeter Waves and the 15th International Conference on Terahertz Electronics (IRMMW-THz) - Cardiff (2007.9.2-2007.9.9)] 2007 Joint 32nd International Conference on Infrared and Millimeter Waves and the 15th International Conference on Terahertz Electronics - Generation of terahertz pulsed radiation from photoconductive emitters using 1060 nm laser excitation

Hinkov, I., Harzendorf, G., Kluska, S., Hinkov, B., Kamaruzaman, K., Beigang, R., Heinrich, J., Hoefling, S., Forchel, A.

Year:

2007

Language:

english

File:

PDF, 1.07 MB

english, 2007

26

CT-gezielte Nierenzystenverödung

Mansfeld, L., Boitz, F., Marciniak, H., Schnorr, H., Harzendorf, E., Poehls, Ch., Cimanowski, N., Cobet, H.

Journal:

RöFo - Fortschritte auf dem Gebiet der R

Year:

1987

Language:

german

File:

PDF, 1.58 MB

german, 1987

27

SPIE Proceedings [SPIE SPIE Solar Energy + Technology - San Diego, California (Sunday 21 August 2011)] Thin Film Solar Technology III - Effects of metallic nanoparticle arrays in Si solar cell structures

Benkenstein, Tino, Eldada, Louay A., Flämmich, Michael, Harzendorf, Torsten, Käsebier, Thomas, Michaelis, Dirk, Oliva, Maria, Wächter, Christoph, Zeitner, Uwe

Year:

2011

Language:

english

File:

PDF, 1.69 MB

english, 2011

28

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Micro-Optics 2012 - Novel gap alignment sensor for high-resolution proximity lithography

Harzendorf, Torsten, Stuerzebecher, Lorenz, Zeitner, Uwe D., Thienpont, Hugo, Mohr, Jürgen, Zappe, Hans, Nakajima, Hirochika

Year:

2012

Language:

english

File:

PDF, 3.57 MB

english, 2012

29

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining Technology for Micro-Optics - Fabrication of microlens arrays in CaF2 by ion milling

Flamm, Dieter, Schindler, Axel, Harzendorf, Torsten, Kley, Ernst-Bernhard, Lee, Sing H., Johnson, Eric G.

Year:

2000

Language:

english

File:

PDF, 1.01 MB

english, 2000

30

Manufacturing cost - a critical evaluation criteria for new developments in wind turbine drivetrain technologies

Harzendorf, F., Azzam, B., Schelenz, R., Jacobs, G.

Journal:

Journal of Physics Conference Series

Year:

2018

Language:

english

File:

PDF, 1.42 MB

english, 2018

31

Pattern Discovery in White Etching Crack Experimental Data Using Machine Learning Techniques

Azzam, Baher, Harzendorf, Freia, Schelenz, Ralf, Holweger, Walter, Jacobs, Georg

Journal:

Applied Sciences

Year:

2019

File:

PDF, 1.34 MB

2019

32

[IEEE 2019 24th Microoptics Conference (MOC) - Toyama, Japan (2019.11.17-2019.11.20)] 2019 24th Microoptics Conference (MOC) - Miniature Integrated Spectrometer Array

Danz, Norbert, Hofer, Bernd, Forster, Erik, Harzendorf, Torsten, Dannberg, Peter, Leitel, Robert, Kleinle, Sylke, Brunner, Robert

Year:

2019

File:

PDF, 670 KB

2019